JPS5429873B2 - - Google Patents
Info
- Publication number
- JPS5429873B2 JPS5429873B2 JP15837476A JP15837476A JPS5429873B2 JP S5429873 B2 JPS5429873 B2 JP S5429873B2 JP 15837476 A JP15837476 A JP 15837476A JP 15837476 A JP15837476 A JP 15837476A JP S5429873 B2 JPS5429873 B2 JP S5429873B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15837476A JPS5391590A (en) | 1976-12-27 | 1976-12-27 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15837476A JPS5391590A (en) | 1976-12-27 | 1976-12-27 | Manufacture of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5391590A JPS5391590A (en) | 1978-08-11 |
JPS5429873B2 true JPS5429873B2 (en) | 1979-09-26 |
Family
ID=15670296
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15837476A Granted JPS5391590A (en) | 1976-12-27 | 1976-12-27 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5391590A (en) |
-
1976
- 1976-12-27 JP JP15837476A patent/JPS5391590A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5391590A (en) | 1978-08-11 |