JPS5429450B2 - - Google Patents
Info
- Publication number
- JPS5429450B2 JPS5429450B2 JP11934976A JP11934976A JPS5429450B2 JP S5429450 B2 JPS5429450 B2 JP S5429450B2 JP 11934976 A JP11934976 A JP 11934976A JP 11934976 A JP11934976 A JP 11934976A JP S5429450 B2 JPS5429450 B2 JP S5429450B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11934976A JPS5344442A (en) | 1976-10-06 | 1976-10-06 | Method of forming metallic film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11934976A JPS5344442A (en) | 1976-10-06 | 1976-10-06 | Method of forming metallic film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5344442A JPS5344442A (en) | 1978-04-21 |
| JPS5429450B2 true JPS5429450B2 (en) | 1979-09-22 |
Family
ID=14759279
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11934976A Granted JPS5344442A (en) | 1976-10-06 | 1976-10-06 | Method of forming metallic film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5344442A (en) |
-
1976
- 1976-10-06 JP JP11934976A patent/JPS5344442A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5344442A (en) | 1978-04-21 |