JPS5429411B2 - - Google Patents
Info
- Publication number
- JPS5429411B2 JPS5429411B2 JP10400676A JP10400676A JPS5429411B2 JP S5429411 B2 JPS5429411 B2 JP S5429411B2 JP 10400676 A JP10400676 A JP 10400676A JP 10400676 A JP10400676 A JP 10400676A JP S5429411 B2 JPS5429411 B2 JP S5429411B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Drying Of Semiconductors (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10400676A JPS5329237A (en) | 1976-08-31 | 1976-08-31 | Gas reaction device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10400676A JPS5329237A (en) | 1976-08-31 | 1976-08-31 | Gas reaction device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5329237A JPS5329237A (en) | 1978-03-18 |
| JPS5429411B2 true JPS5429411B2 (enExample) | 1979-09-22 |
Family
ID=14369170
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10400676A Granted JPS5329237A (en) | 1976-08-31 | 1976-08-31 | Gas reaction device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5329237A (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5456951A (en) * | 1977-10-14 | 1979-05-08 | Fujitsu Ltd | Plasma etching device |
| JPS6289137U (enExample) * | 1985-11-22 | 1987-06-08 | ||
| JP2630155B2 (ja) * | 1992-03-27 | 1997-07-16 | 株式会社日立製作所 | 真空処理装置 |
| US6332925B1 (en) | 1996-05-23 | 2001-12-25 | Ebara Corporation | Evacuation system |
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1976
- 1976-08-31 JP JP10400676A patent/JPS5329237A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5329237A (en) | 1978-03-18 |