JPS5429410B2 - - Google Patents
Info
- Publication number
- JPS5429410B2 JPS5429410B2 JP2506276A JP2506276A JPS5429410B2 JP S5429410 B2 JPS5429410 B2 JP S5429410B2 JP 2506276 A JP2506276 A JP 2506276A JP 2506276 A JP2506276 A JP 2506276A JP S5429410 B2 JPS5429410 B2 JP S5429410B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2506276A JPS52108348A (en) | 1976-03-10 | 1976-03-10 | Method of detecting terminal point of ion milling time |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2506276A JPS52108348A (en) | 1976-03-10 | 1976-03-10 | Method of detecting terminal point of ion milling time |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52108348A JPS52108348A (en) | 1977-09-10 |
| JPS5429410B2 true JPS5429410B2 (en:Method) | 1979-09-22 |
Family
ID=12155421
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2506276A Granted JPS52108348A (en) | 1976-03-10 | 1976-03-10 | Method of detecting terminal point of ion milling time |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52108348A (en:Method) |
-
1976
- 1976-03-10 JP JP2506276A patent/JPS52108348A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52108348A (en) | 1977-09-10 |