JPS5429324U - - Google Patents

Info

Publication number
JPS5429324U
JPS5429324U JP1977102837U JP10283777U JPS5429324U JP S5429324 U JPS5429324 U JP S5429324U JP 1977102837 U JP1977102837 U JP 1977102837U JP 10283777 U JP10283777 U JP 10283777U JP S5429324 U JPS5429324 U JP S5429324U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1977102837U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1977102837U priority Critical patent/JPS5429324U/ja
Publication of JPS5429324U publication Critical patent/JPS5429324U/ja
Pending legal-status Critical Current

Links

Classifications

    • Y02E60/12

Landscapes

  • Sealing Battery Cases Or Jackets (AREA)
JP1977102837U 1977-07-29 1977-07-29 Pending JPS5429324U (id)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1977102837U JPS5429324U (id) 1977-07-29 1977-07-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1977102837U JPS5429324U (id) 1977-07-29 1977-07-29

Publications (1)

Publication Number Publication Date
JPS5429324U true JPS5429324U (id) 1979-02-26

Family

ID=29042792

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977102837U Pending JPS5429324U (id) 1977-07-29 1977-07-29

Country Status (1)

Country Link
JP (1) JPS5429324U (id)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6092472A (ja) * 1983-10-24 1985-05-24 Ulvac Corp 広帯域スパツタ圧力用タ−ゲツト電極
JPS61177375A (ja) * 1985-01-30 1986-08-09 Shimadzu Corp 平面型プラズマcvd装置
JPS61167374U (id) * 1985-04-08 1986-10-17
JPS61167373U (id) * 1985-04-08 1986-10-17
JPS61204363U (id) * 1985-06-11 1986-12-23
JPH0375356A (ja) * 1989-08-17 1991-03-29 Ulvac Japan Ltd カソード電極の製造方法

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6092472A (ja) * 1983-10-24 1985-05-24 Ulvac Corp 広帯域スパツタ圧力用タ−ゲツト電極
JPS61177375A (ja) * 1985-01-30 1986-08-09 Shimadzu Corp 平面型プラズマcvd装置
JPH0542510B2 (id) * 1985-01-30 1993-06-28 Shimadzu Corp
JPS61167374U (id) * 1985-04-08 1986-10-17
JPS61167373U (id) * 1985-04-08 1986-10-17
JPS61204363U (id) * 1985-06-11 1986-12-23
JPH0375356A (ja) * 1989-08-17 1991-03-29 Ulvac Japan Ltd カソード電極の製造方法

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