JPS5429075B2 - - Google Patents
Info
- Publication number
- JPS5429075B2 JPS5429075B2 JP7781573A JP7781573A JPS5429075B2 JP S5429075 B2 JPS5429075 B2 JP S5429075B2 JP 7781573 A JP7781573 A JP 7781573A JP 7781573 A JP7781573 A JP 7781573A JP S5429075 B2 JPS5429075 B2 JP S5429075B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2234381A DE2234381C3 (en) | 1972-07-10 | 1972-07-10 | Electron beam lighting system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4946670A JPS4946670A (en) | 1974-05-04 |
| JPS5429075B2 true JPS5429075B2 (en) | 1979-09-20 |
Family
ID=5850513
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7781573A Expired JPS5429075B2 (en) | 1972-07-10 | 1973-07-10 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3862419A (en) |
| JP (1) | JPS5429075B2 (en) |
| DE (1) | DE2234381C3 (en) |
| GB (1) | GB1444098A (en) |
| NL (1) | NL7309348A (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3204897A1 (en) * | 1982-02-12 | 1983-08-25 | Siemens AG, 1000 Berlin und 8000 München | BODY RADIATOR GENERATING SYSTEM AND METHOD FOR ITS OPERATION |
| US4426583A (en) * | 1982-05-10 | 1984-01-17 | International Business Machines Corporation | Electron beam potential switching apparatus |
| FR2527383A1 (en) * | 1982-05-24 | 1983-11-25 | Univ Reims Champagne Ardenne | ELECTRON GUN WITH FIELD EMISSION CATHODE AND MAGNETIC LENS |
| JPH0619960B2 (en) * | 1986-12-27 | 1994-03-16 | 日本電子株式会社 | Electron beam apparatus having thermal field emission electron source |
| GB2215907B (en) * | 1987-07-14 | 1992-04-15 | Jeol Ltd | Apparatus using a charged-particle beam |
| JP3998556B2 (en) * | 2002-10-17 | 2007-10-31 | 株式会社東研 | High resolution X-ray microscope |
| US7218703B2 (en) * | 2003-11-21 | 2007-05-15 | Tohken Co., Ltd. | X-ray microscopic inspection apparatus |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS494972A (en) * | 1972-04-26 | 1974-01-17 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3678333A (en) * | 1970-06-15 | 1972-07-18 | American Optical Corp | Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges |
-
1972
- 1972-07-10 DE DE2234381A patent/DE2234381C3/en not_active Expired
-
1973
- 1973-06-25 US US373415A patent/US3862419A/en not_active Expired - Lifetime
- 1973-07-04 NL NL7309348A patent/NL7309348A/xx not_active Application Discontinuation
- 1973-07-10 JP JP7781573A patent/JPS5429075B2/ja not_active Expired
- 1973-07-10 GB GB2986173A patent/GB1444098A/en not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS494972A (en) * | 1972-04-26 | 1974-01-17 |
Also Published As
| Publication number | Publication date |
|---|---|
| NL7309348A (en) | 1974-01-14 |
| GB1444098A (en) | 1976-07-28 |
| JPS4946670A (en) | 1974-05-04 |
| US3862419A (en) | 1975-01-21 |
| DE2234381C3 (en) | 1975-10-16 |
| DE2234381B2 (en) | 1975-02-27 |
| DE2234381A1 (en) | 1974-01-31 |