JPS5428921Y2 - - Google Patents

Info

Publication number
JPS5428921Y2
JPS5428921Y2 JP1975056581U JP5658175U JPS5428921Y2 JP S5428921 Y2 JPS5428921 Y2 JP S5428921Y2 JP 1975056581 U JP1975056581 U JP 1975056581U JP 5658175 U JP5658175 U JP 5658175U JP S5428921 Y2 JPS5428921 Y2 JP S5428921Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1975056581U
Other languages
Japanese (ja)
Other versions
JPS51136055U (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1975056581U priority Critical patent/JPS5428921Y2/ja
Publication of JPS51136055U publication Critical patent/JPS51136055U/ja
Application granted granted Critical
Publication of JPS5428921Y2 publication Critical patent/JPS5428921Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP1975056581U 1975-04-24 1975-04-24 Expired JPS5428921Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1975056581U JPS5428921Y2 (https=) 1975-04-24 1975-04-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1975056581U JPS5428921Y2 (https=) 1975-04-24 1975-04-24

Publications (2)

Publication Number Publication Date
JPS51136055U JPS51136055U (https=) 1976-11-02
JPS5428921Y2 true JPS5428921Y2 (https=) 1979-09-14

Family

ID=28211029

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1975056581U Expired JPS5428921Y2 (https=) 1975-04-24 1975-04-24

Country Status (1)

Country Link
JP (1) JPS5428921Y2 (https=)

Also Published As

Publication number Publication date
JPS51136055U (https=) 1976-11-02

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