JPS5428781A - Continuous physical vapor depositing device - Google Patents
Continuous physical vapor depositing deviceInfo
- Publication number
- JPS5428781A JPS5428781A JP9525777A JP9525777A JPS5428781A JP S5428781 A JPS5428781 A JP S5428781A JP 9525777 A JP9525777 A JP 9525777A JP 9525777 A JP9525777 A JP 9525777A JP S5428781 A JPS5428781 A JP S5428781A
- Authority
- JP
- Japan
- Prior art keywords
- physical vapor
- depositing device
- vapor depositing
- continuous physical
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
Abstract
PURPOSE:To provide the subject device wherein a roulette device for applying roulette pressing transes at both edges in the width direction of a band-like support is provided in the route of transporting the flexible band-like support, and a vapor-deposited film almost free of pinholes and scratches is produced on the belt-like support.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9525777A JPS5428781A (en) | 1977-08-09 | 1977-08-09 | Continuous physical vapor depositing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9525777A JPS5428781A (en) | 1977-08-09 | 1977-08-09 | Continuous physical vapor depositing device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5428781A true JPS5428781A (en) | 1979-03-03 |
Family
ID=14132701
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9525777A Pending JPS5428781A (en) | 1977-08-09 | 1977-08-09 | Continuous physical vapor depositing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5428781A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59210951A (en) * | 1983-05-16 | 1984-11-29 | Kakogawa Plast Kk | Method for preventing long strip film from being broken |
US4612206A (en) * | 1984-06-04 | 1986-09-16 | Nisshin Steel Company, Ltd. | Method of controlling deposition amount distribution in a vacuum deposition plating |
US4942000A (en) * | 1986-07-30 | 1990-07-17 | Penoyer John A | Contactless knurling process for winding of high modulus thermoplastic films |
NL1025096C2 (en) * | 2003-12-21 | 2005-06-23 | Otb Group Bv | Method and device for manufacturing a functional layer consisting of at least two components. |
-
1977
- 1977-08-09 JP JP9525777A patent/JPS5428781A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59210951A (en) * | 1983-05-16 | 1984-11-29 | Kakogawa Plast Kk | Method for preventing long strip film from being broken |
US4612206A (en) * | 1984-06-04 | 1986-09-16 | Nisshin Steel Company, Ltd. | Method of controlling deposition amount distribution in a vacuum deposition plating |
US4942000A (en) * | 1986-07-30 | 1990-07-17 | Penoyer John A | Contactless knurling process for winding of high modulus thermoplastic films |
NL1025096C2 (en) * | 2003-12-21 | 2005-06-23 | Otb Group Bv | Method and device for manufacturing a functional layer consisting of at least two components. |
WO2005061754A1 (en) * | 2003-12-21 | 2005-07-07 | Otb Group B.V. | Method and apparatus for manufacturing a functional layer consisting of at least two components |
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