JPS5428268B2 - - Google Patents
Info
- Publication number
- JPS5428268B2 JPS5428268B2 JP2224577A JP2224577A JPS5428268B2 JP S5428268 B2 JPS5428268 B2 JP S5428268B2 JP 2224577 A JP2224577 A JP 2224577A JP 2224577 A JP2224577 A JP 2224577A JP S5428268 B2 JPS5428268 B2 JP S5428268B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2224577A JPS53108285A (en) | 1977-03-03 | 1977-03-03 | Photomask original plate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2224577A JPS53108285A (en) | 1977-03-03 | 1977-03-03 | Photomask original plate |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53108285A JPS53108285A (en) | 1978-09-20 |
JPS5428268B2 true JPS5428268B2 (sl) | 1979-09-14 |
Family
ID=12077400
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2224577A Granted JPS53108285A (en) | 1977-03-03 | 1977-03-03 | Photomask original plate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53108285A (sl) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58169150A (ja) * | 1982-03-30 | 1983-10-05 | Fujitsu Ltd | フオトマスクの製造方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS492483A (sl) * | 1972-04-19 | 1974-01-10 |
-
1977
- 1977-03-03 JP JP2224577A patent/JPS53108285A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS492483A (sl) * | 1972-04-19 | 1974-01-10 |
Also Published As
Publication number | Publication date |
---|---|
JPS53108285A (en) | 1978-09-20 |