JPS5428268B2 - - Google Patents

Info

Publication number
JPS5428268B2
JPS5428268B2 JP2224577A JP2224577A JPS5428268B2 JP S5428268 B2 JPS5428268 B2 JP S5428268B2 JP 2224577 A JP2224577 A JP 2224577A JP 2224577 A JP2224577 A JP 2224577A JP S5428268 B2 JPS5428268 B2 JP S5428268B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2224577A
Other languages
Japanese (ja)
Other versions
JPS53108285A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2224577A priority Critical patent/JPS53108285A/ja
Publication of JPS53108285A publication Critical patent/JPS53108285A/ja
Publication of JPS5428268B2 publication Critical patent/JPS5428268B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP2224577A 1977-03-03 1977-03-03 Photomask original plate Granted JPS53108285A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2224577A JPS53108285A (en) 1977-03-03 1977-03-03 Photomask original plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2224577A JPS53108285A (en) 1977-03-03 1977-03-03 Photomask original plate

Publications (2)

Publication Number Publication Date
JPS53108285A JPS53108285A (en) 1978-09-20
JPS5428268B2 true JPS5428268B2 (ar) 1979-09-14

Family

ID=12077400

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2224577A Granted JPS53108285A (en) 1977-03-03 1977-03-03 Photomask original plate

Country Status (1)

Country Link
JP (1) JPS53108285A (ar)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58169150A (ja) * 1982-03-30 1983-10-05 Fujitsu Ltd フオトマスクの製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS492483A (ar) * 1972-04-19 1974-01-10

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS492483A (ar) * 1972-04-19 1974-01-10

Also Published As

Publication number Publication date
JPS53108285A (en) 1978-09-20

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