JPS5427375A - Device for transferring fine pattern - Google Patents

Device for transferring fine pattern

Info

Publication number
JPS5427375A
JPS5427375A JP9222877A JP9222877A JPS5427375A JP S5427375 A JPS5427375 A JP S5427375A JP 9222877 A JP9222877 A JP 9222877A JP 9222877 A JP9222877 A JP 9222877A JP S5427375 A JPS5427375 A JP S5427375A
Authority
JP
Japan
Prior art keywords
fine pattern
transferring fine
transferring
pattern
fine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9222877A
Other languages
Japanese (ja)
Other versions
JPS5915380B2 (en
Inventor
Shinichirou Takasu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP52092228A priority Critical patent/JPS5915380B2/en
Publication of JPS5427375A publication Critical patent/JPS5427375A/en
Publication of JPS5915380B2 publication Critical patent/JPS5915380B2/en
Expired legal-status Critical Current

Links

JP52092228A 1977-08-02 1977-08-02 Fine pattern transfer device Expired JPS5915380B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52092228A JPS5915380B2 (en) 1977-08-02 1977-08-02 Fine pattern transfer device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52092228A JPS5915380B2 (en) 1977-08-02 1977-08-02 Fine pattern transfer device

Publications (2)

Publication Number Publication Date
JPS5427375A true JPS5427375A (en) 1979-03-01
JPS5915380B2 JPS5915380B2 (en) 1984-04-09

Family

ID=14048570

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52092228A Expired JPS5915380B2 (en) 1977-08-02 1977-08-02 Fine pattern transfer device

Country Status (1)

Country Link
JP (1) JPS5915380B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5610927A (en) * 1979-07-06 1981-02-03 Chiyou Lsi Gijutsu Kenkyu Kumiai Electron beam transfer device
JPS5961135A (en) * 1982-09-30 1984-04-07 Toshiba Corp Electron beam transfer device
JPS60224220A (en) * 1984-04-02 1985-11-08 フィリップス　エレクトロニクス　ネムローゼ　フェンノートシャップ Electron image projecting device
JP2014138163A (en) * 2013-01-18 2014-07-28 Ebara Corp Electronic exposure apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5610927A (en) * 1979-07-06 1981-02-03 Chiyou Lsi Gijutsu Kenkyu Kumiai Electron beam transfer device
JPS5961135A (en) * 1982-09-30 1984-04-07 Toshiba Corp Electron beam transfer device
JPS60224220A (en) * 1984-04-02 1985-11-08 フィリップス　エレクトロニクス　ネムローゼ　フェンノートシャップ Electron image projecting device
JP2014138163A (en) * 2013-01-18 2014-07-28 Ebara Corp Electronic exposure apparatus

Also Published As

Publication number Publication date
JPS5915380B2 (en) 1984-04-09

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