JPS5427237B2 - - Google Patents
Info
- Publication number
- JPS5427237B2 JPS5427237B2 JP10650776A JP10650776A JPS5427237B2 JP S5427237 B2 JPS5427237 B2 JP S5427237B2 JP 10650776 A JP10650776 A JP 10650776A JP 10650776 A JP10650776 A JP 10650776A JP S5427237 B2 JPS5427237 B2 JP S5427237B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10650776A JPS5331974A (en) | 1976-09-06 | 1976-09-06 | Mask for exposure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10650776A JPS5331974A (en) | 1976-09-06 | 1976-09-06 | Mask for exposure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5331974A JPS5331974A (en) | 1978-03-25 |
| JPS5427237B2 true JPS5427237B2 (h) | 1979-09-08 |
Family
ID=14435331
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10650776A Granted JPS5331974A (en) | 1976-09-06 | 1976-09-06 | Mask for exposure |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5331974A (h) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02129910A (ja) * | 1988-11-09 | 1990-05-18 | Mitsubishi Electric Corp | Ｘ線露光用マスク |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52100872A (en) * | 1976-02-19 | 1977-08-24 | Nec Corp | Fabrication of mask for x-ray exposure |
-
1976
- 1976-09-06 JP JP10650776A patent/JPS5331974A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5331974A (en) | 1978-03-25 |