JPS5425675Y2 - - Google Patents

Info

Publication number
JPS5425675Y2
JPS5425675Y2 JP11951274U JP11951274U JPS5425675Y2 JP S5425675 Y2 JPS5425675 Y2 JP S5425675Y2 JP 11951274 U JP11951274 U JP 11951274U JP 11951274 U JP11951274 U JP 11951274U JP S5425675 Y2 JPS5425675 Y2 JP S5425675Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11951274U
Other languages
Japanese (ja)
Other versions
JPS5146998U (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11951274U priority Critical patent/JPS5425675Y2/ja
Publication of JPS5146998U publication Critical patent/JPS5146998U/ja
Application granted granted Critical
Publication of JPS5425675Y2 publication Critical patent/JPS5425675Y2/ja
Expired legal-status Critical Current

Links

JP11951274U 1974-10-03 1974-10-03 Expired JPS5425675Y2 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11951274U JPS5425675Y2 (zh) 1974-10-03 1974-10-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11951274U JPS5425675Y2 (zh) 1974-10-03 1974-10-03

Publications (2)

Publication Number Publication Date
JPS5146998U JPS5146998U (zh) 1976-04-07
JPS5425675Y2 true JPS5425675Y2 (zh) 1979-08-27

Family

ID=28359109

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11951274U Expired JPS5425675Y2 (zh) 1974-10-03 1974-10-03

Country Status (1)

Country Link
JP (1) JPS5425675Y2 (zh)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8916315B2 (en) 2009-08-26 2014-12-23 D2S, Inc. Method for fracturing and forming a pattern using shaped beam charged particle beam lithography
US9164372B2 (en) 2009-08-26 2015-10-20 D2S, Inc. Method and system for forming non-manhattan patterns using variable shaped beam lithography
US9268214B2 (en) 2008-09-01 2016-02-23 D2S, Inc. Method for forming circular patterns on a surface
US9274412B2 (en) 2008-09-01 2016-03-01 D2S, Inc. Method and system for design of a reticle to be manufactured using variable shaped beam lithography
US9323140B2 (en) 2008-09-01 2016-04-26 D2S, Inc. Method and system for forming a pattern on a reticle using charged particle beam lithography
US9341936B2 (en) 2008-09-01 2016-05-17 D2S, Inc. Method and system for forming a pattern on a reticle using charged particle beam lithography
US9372391B2 (en) 2008-09-01 2016-06-21 D2S, Inc. Method and system for forming patterns using charged particle beam lithography with variable pattern dosage
US9448473B2 (en) 2009-08-26 2016-09-20 D2S, Inc. Method for fracturing and forming a pattern using shaped beam charged particle beam lithography

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9268214B2 (en) 2008-09-01 2016-02-23 D2S, Inc. Method for forming circular patterns on a surface
US9274412B2 (en) 2008-09-01 2016-03-01 D2S, Inc. Method and system for design of a reticle to be manufactured using variable shaped beam lithography
US9323140B2 (en) 2008-09-01 2016-04-26 D2S, Inc. Method and system for forming a pattern on a reticle using charged particle beam lithography
US9341936B2 (en) 2008-09-01 2016-05-17 D2S, Inc. Method and system for forming a pattern on a reticle using charged particle beam lithography
US9372391B2 (en) 2008-09-01 2016-06-21 D2S, Inc. Method and system for forming patterns using charged particle beam lithography with variable pattern dosage
US8916315B2 (en) 2009-08-26 2014-12-23 D2S, Inc. Method for fracturing and forming a pattern using shaped beam charged particle beam lithography
US9164372B2 (en) 2009-08-26 2015-10-20 D2S, Inc. Method and system for forming non-manhattan patterns using variable shaped beam lithography
US9448473B2 (en) 2009-08-26 2016-09-20 D2S, Inc. Method for fracturing and forming a pattern using shaped beam charged particle beam lithography

Also Published As

Publication number Publication date
JPS5146998U (zh) 1976-04-07

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