JPS542540B2 - - Google Patents
Info
- Publication number
- JPS542540B2 JPS542540B2 JP11562976A JP11562976A JPS542540B2 JP S542540 B2 JPS542540 B2 JP S542540B2 JP 11562976 A JP11562976 A JP 11562976A JP 11562976 A JP11562976 A JP 11562976A JP S542540 B2 JPS542540 B2 JP S542540B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11562976A JPS5340270A (en) | 1976-09-27 | 1976-09-27 | Semiconductor distribution measuring method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11562976A JPS5340270A (en) | 1976-09-27 | 1976-09-27 | Semiconductor distribution measuring method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5340270A JPS5340270A (en) | 1978-04-12 |
| JPS542540B2 true JPS542540B2 (en) | 1979-02-08 |
Family
ID=14667370
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11562976A Granted JPS5340270A (en) | 1976-09-27 | 1976-09-27 | Semiconductor distribution measuring method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5340270A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5539627A (en) * | 1978-09-14 | 1980-03-19 | Nippon Telegr & Teleph Corp <Ntt> | Automatic device for measuring specific resistance distribution of semiconductor |
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1976
- 1976-09-27 JP JP11562976A patent/JPS5340270A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5340270A (en) | 1978-04-12 |