JPS5424139Y2 - - Google Patents

Info

Publication number
JPS5424139Y2
JPS5424139Y2 JP2181475U JP2181475U JPS5424139Y2 JP S5424139 Y2 JPS5424139 Y2 JP S5424139Y2 JP 2181475 U JP2181475 U JP 2181475U JP 2181475 U JP2181475 U JP 2181475U JP S5424139 Y2 JPS5424139 Y2 JP S5424139Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2181475U
Other languages
Japanese (ja)
Other versions
JPS51105049U (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2181475U priority Critical patent/JPS5424139Y2/ja
Publication of JPS51105049U publication Critical patent/JPS51105049U/ja
Application granted granted Critical
Publication of JPS5424139Y2 publication Critical patent/JPS5424139Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP2181475U 1975-02-19 1975-02-19 Expired JPS5424139Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2181475U JPS5424139Y2 (en:Method) 1975-02-19 1975-02-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2181475U JPS5424139Y2 (en:Method) 1975-02-19 1975-02-19

Publications (2)

Publication Number Publication Date
JPS51105049U JPS51105049U (en:Method) 1976-08-23
JPS5424139Y2 true JPS5424139Y2 (en:Method) 1979-08-16

Family

ID=28113869

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2181475U Expired JPS5424139Y2 (en:Method) 1975-02-19 1975-02-19

Country Status (1)

Country Link
JP (1) JPS5424139Y2 (en:Method)

Also Published As

Publication number Publication date
JPS51105049U (en:Method) 1976-08-23

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