JPS5424138Y2 - - Google Patents

Info

Publication number
JPS5424138Y2
JPS5424138Y2 JP1062675U JP1062675U JPS5424138Y2 JP S5424138 Y2 JPS5424138 Y2 JP S5424138Y2 JP 1062675 U JP1062675 U JP 1062675U JP 1062675 U JP1062675 U JP 1062675U JP S5424138 Y2 JPS5424138 Y2 JP S5424138Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1062675U
Other languages
Japanese (ja)
Other versions
JPS5192544U (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1062675U priority Critical patent/JPS5424138Y2/ja
Publication of JPS5192544U publication Critical patent/JPS5192544U/ja
Application granted granted Critical
Publication of JPS5424138Y2 publication Critical patent/JPS5424138Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1062675U 1975-01-24 1975-01-24 Expired JPS5424138Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1062675U JPS5424138Y2 (en:Method) 1975-01-24 1975-01-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1062675U JPS5424138Y2 (en:Method) 1975-01-24 1975-01-24

Publications (2)

Publication Number Publication Date
JPS5192544U JPS5192544U (en:Method) 1976-07-24
JPS5424138Y2 true JPS5424138Y2 (en:Method) 1979-08-16

Family

ID=28082463

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1062675U Expired JPS5424138Y2 (en:Method) 1975-01-24 1975-01-24

Country Status (1)

Country Link
JP (1) JPS5424138Y2 (en:Method)

Also Published As

Publication number Publication date
JPS5192544U (en:Method) 1976-07-24

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