JPS542376U - - Google Patents
Info
- Publication number
- JPS542376U JPS542376U JP7532377U JP7532377U JPS542376U JP S542376 U JPS542376 U JP S542376U JP 7532377 U JP7532377 U JP 7532377U JP 7532377 U JP7532377 U JP 7532377U JP S542376 U JPS542376 U JP S542376U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7532377U JPS542376U (it) | 1977-06-08 | 1977-06-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7532377U JPS542376U (it) | 1977-06-08 | 1977-06-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS542376U true JPS542376U (it) | 1979-01-09 |
Family
ID=28989643
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7532377U Pending JPS542376U (it) | 1977-06-08 | 1977-06-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS542376U (it) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5666044A (en) * | 1979-11-05 | 1981-06-04 | Toshiba Corp | Semiconductor device |
| JP2012114228A (ja) * | 2010-11-24 | 2012-06-14 | Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 | ウェーハの洗浄方法 |
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1977
- 1977-06-08 JP JP7532377U patent/JPS542376U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5666044A (en) * | 1979-11-05 | 1981-06-04 | Toshiba Corp | Semiconductor device |
| JP2012114228A (ja) * | 2010-11-24 | 2012-06-14 | Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 | ウェーハの洗浄方法 |