JPS5422872B2 - - Google Patents

Info

Publication number
JPS5422872B2
JPS5422872B2 JP7770174A JP7770174A JPS5422872B2 JP S5422872 B2 JPS5422872 B2 JP S5422872B2 JP 7770174 A JP7770174 A JP 7770174A JP 7770174 A JP7770174 A JP 7770174A JP S5422872 B2 JPS5422872 B2 JP S5422872B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7770174A
Other languages
Japanese (ja)
Other versions
JPS516666A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7770174A priority Critical patent/JPS516666A/ja
Publication of JPS516666A publication Critical patent/JPS516666A/ja
Publication of JPS5422872B2 publication Critical patent/JPS5422872B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP7770174A 1974-07-06 1974-07-06 Tanketsushohakumakusakuseihoho Granted JPS516666A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7770174A JPS516666A (ja) 1974-07-06 1974-07-06 Tanketsushohakumakusakuseihoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7770174A JPS516666A (ja) 1974-07-06 1974-07-06 Tanketsushohakumakusakuseihoho

Publications (2)

Publication Number Publication Date
JPS516666A JPS516666A (ja) 1976-01-20
JPS5422872B2 true JPS5422872B2 (enrdf_load_stackoverflow) 1979-08-09

Family

ID=13641190

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7770174A Granted JPS516666A (ja) 1974-07-06 1974-07-06 Tanketsushohakumakusakuseihoho

Country Status (1)

Country Link
JP (1) JPS516666A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52101969A (en) * 1976-02-23 1977-08-26 Yamazaki Shunpei Semiconductor device
JPS5357969A (en) * 1976-11-05 1978-05-25 Mitsubishi Electric Corp Production of semiconductor substrate
JPS5530835A (en) * 1978-08-25 1980-03-04 Takashi Katoda Method of forming heterogeneous junction in semiconductor
WO1984001740A1 (en) * 1982-11-01 1984-05-10 Microbot Inc Improved robotic arm

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5651498B2 (enrdf_load_stackoverflow) * 1972-07-25 1981-12-05

Also Published As

Publication number Publication date
JPS516666A (ja) 1976-01-20

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