JPS5422870B2 - - Google Patents
Info
- Publication number
- JPS5422870B2 JPS5422870B2 JP2840974A JP2840974A JPS5422870B2 JP S5422870 B2 JPS5422870 B2 JP S5422870B2 JP 2840974 A JP2840974 A JP 2840974A JP 2840974 A JP2840974 A JP 2840974A JP S5422870 B2 JPS5422870 B2 JP S5422870B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2840974A JPS5422870B2 (https=) | 1974-03-12 | 1974-03-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2840974A JPS5422870B2 (https=) | 1974-03-12 | 1974-03-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50122172A JPS50122172A (https=) | 1975-09-25 |
| JPS5422870B2 true JPS5422870B2 (https=) | 1979-08-09 |
Family
ID=12247846
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2840974A Expired JPS5422870B2 (https=) | 1974-03-12 | 1974-03-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5422870B2 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5823926B2 (ja) * | 1977-11-11 | 1983-05-18 | 三菱電機株式会社 | 熱処理装置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4332167Y1 (https=) * | 1966-09-29 | 1968-12-27 | ||
| JPS497264U (https=) * | 1972-05-02 | 1974-01-22 |
-
1974
- 1974-03-12 JP JP2840974A patent/JPS5422870B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS50122172A (https=) | 1975-09-25 |