JPS5422870B2 - - Google Patents

Info

Publication number
JPS5422870B2
JPS5422870B2 JP2840974A JP2840974A JPS5422870B2 JP S5422870 B2 JPS5422870 B2 JP S5422870B2 JP 2840974 A JP2840974 A JP 2840974A JP 2840974 A JP2840974 A JP 2840974A JP S5422870 B2 JPS5422870 B2 JP S5422870B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2840974A
Other languages
Japanese (ja)
Other versions
JPS50122172A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2840974A priority Critical patent/JPS5422870B2/ja
Publication of JPS50122172A publication Critical patent/JPS50122172A/ja
Publication of JPS5422870B2 publication Critical patent/JPS5422870B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP2840974A 1974-03-12 1974-03-12 Expired JPS5422870B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2840974A JPS5422870B2 (enrdf_load_stackoverflow) 1974-03-12 1974-03-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2840974A JPS5422870B2 (enrdf_load_stackoverflow) 1974-03-12 1974-03-12

Publications (2)

Publication Number Publication Date
JPS50122172A JPS50122172A (enrdf_load_stackoverflow) 1975-09-25
JPS5422870B2 true JPS5422870B2 (enrdf_load_stackoverflow) 1979-08-09

Family

ID=12247846

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2840974A Expired JPS5422870B2 (enrdf_load_stackoverflow) 1974-03-12 1974-03-12

Country Status (1)

Country Link
JP (1) JPS5422870B2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5823926B2 (ja) * 1977-11-11 1983-05-18 三菱電機株式会社 熱処理装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4332167Y1 (enrdf_load_stackoverflow) * 1966-09-29 1968-12-27
JPS497264U (enrdf_load_stackoverflow) * 1972-05-02 1974-01-22

Also Published As

Publication number Publication date
JPS50122172A (enrdf_load_stackoverflow) 1975-09-25

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