JPS542272A - Collecting system for sublimable gas - Google Patents

Collecting system for sublimable gas

Info

Publication number
JPS542272A
JPS542272A JP6665177A JP6665177A JPS542272A JP S542272 A JPS542272 A JP S542272A JP 6665177 A JP6665177 A JP 6665177A JP 6665177 A JP6665177 A JP 6665177A JP S542272 A JPS542272 A JP S542272A
Authority
JP
Japan
Prior art keywords
sublimable gas
collecting system
sublimable
gas
solidified layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6665177A
Other languages
Japanese (ja)
Other versions
JPS5920363B2 (en
Inventor
Mizuho Tanaka
Fumio Kawamura
Michio Kunikata
Yoshiki Shibano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6665177A priority Critical patent/JPS5920363B2/en
Publication of JPS542272A publication Critical patent/JPS542272A/en
Publication of JPS5920363B2 publication Critical patent/JPS5920363B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)

Abstract

PURPOSE: To collect sublimable gas efficiently in collecting the sublimable gas by use of a refrigerant, by making refrigerant temp. and internal press. change with time correspondingly to the growth of solidified layer so as to form a dense solidified layer.
COPYRIGHT: (C)1979,JPO&Japio
JP6665177A 1977-06-08 1977-06-08 Operation system for sublimation gas collection equipment Expired JPS5920363B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6665177A JPS5920363B2 (en) 1977-06-08 1977-06-08 Operation system for sublimation gas collection equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6665177A JPS5920363B2 (en) 1977-06-08 1977-06-08 Operation system for sublimation gas collection equipment

Publications (2)

Publication Number Publication Date
JPS542272A true JPS542272A (en) 1979-01-09
JPS5920363B2 JPS5920363B2 (en) 1984-05-12

Family

ID=13322005

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6665177A Expired JPS5920363B2 (en) 1977-06-08 1977-06-08 Operation system for sublimation gas collection equipment

Country Status (1)

Country Link
JP (1) JPS5920363B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5831002U (en) * 1981-08-25 1983-03-01 三菱重工業株式会社 Condensable gas recovery equipment
JPS58107103U (en) * 1982-01-11 1983-07-21 三菱重工業株式会社 Condensable gas recovery equipment
JP2009530083A (en) * 2006-03-14 2009-08-27 プラクスエア・テクノロジー・インコーポレイテッド Selective separation process

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5831002U (en) * 1981-08-25 1983-03-01 三菱重工業株式会社 Condensable gas recovery equipment
JPS58107103U (en) * 1982-01-11 1983-07-21 三菱重工業株式会社 Condensable gas recovery equipment
JP2009530083A (en) * 2006-03-14 2009-08-27 プラクスエア・テクノロジー・インコーポレイテッド Selective separation process

Also Published As

Publication number Publication date
JPS5920363B2 (en) 1984-05-12

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