JPS5422183Y2 - - Google Patents

Info

Publication number
JPS5422183Y2
JPS5422183Y2 JP10998174U JP10998174U JPS5422183Y2 JP S5422183 Y2 JPS5422183 Y2 JP S5422183Y2 JP 10998174 U JP10998174 U JP 10998174U JP 10998174 U JP10998174 U JP 10998174U JP S5422183 Y2 JPS5422183 Y2 JP S5422183Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10998174U
Other languages
Japanese (ja)
Other versions
JPS5136130U (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10998174U priority Critical patent/JPS5422183Y2/ja
Publication of JPS5136130U publication Critical patent/JPS5136130U/ja
Application granted granted Critical
Publication of JPS5422183Y2 publication Critical patent/JPS5422183Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electrically Driven Valve-Operating Means (AREA)
  • Preventing Unauthorised Actuation Of Valves (AREA)
JP10998174U 1974-09-11 1974-09-11 Expired JPS5422183Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10998174U JPS5422183Y2 (en:Method) 1974-09-11 1974-09-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10998174U JPS5422183Y2 (en:Method) 1974-09-11 1974-09-11

Publications (2)

Publication Number Publication Date
JPS5136130U JPS5136130U (en:Method) 1976-03-17
JPS5422183Y2 true JPS5422183Y2 (en:Method) 1979-08-03

Family

ID=28332390

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10998174U Expired JPS5422183Y2 (en:Method) 1974-09-11 1974-09-11

Country Status (1)

Country Link
JP (1) JPS5422183Y2 (en:Method)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60164685U (ja) * 1984-04-12 1985-11-01 三菱電機株式会社 真空装置
JPS6324129U (en:Method) * 1986-07-31 1988-02-17

Also Published As

Publication number Publication date
JPS5136130U (en:Method) 1976-03-17

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