JPS5422183Y2 - - Google Patents

Info

Publication number
JPS5422183Y2
JPS5422183Y2 JP10998174U JP10998174U JPS5422183Y2 JP S5422183 Y2 JPS5422183 Y2 JP S5422183Y2 JP 10998174 U JP10998174 U JP 10998174U JP 10998174 U JP10998174 U JP 10998174U JP S5422183 Y2 JPS5422183 Y2 JP S5422183Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10998174U
Other languages
Japanese (ja)
Other versions
JPS5136130U (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10998174U priority Critical patent/JPS5422183Y2/ja
Publication of JPS5136130U publication Critical patent/JPS5136130U/ja
Application granted granted Critical
Publication of JPS5422183Y2 publication Critical patent/JPS5422183Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electrically Driven Valve-Operating Means (AREA)
  • Preventing Unauthorised Actuation Of Valves (AREA)
JP10998174U 1974-09-11 1974-09-11 Expired JPS5422183Y2 (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10998174U JPS5422183Y2 (en, 2012) 1974-09-11 1974-09-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10998174U JPS5422183Y2 (en, 2012) 1974-09-11 1974-09-11

Publications (2)

Publication Number Publication Date
JPS5136130U JPS5136130U (en, 2012) 1976-03-17
JPS5422183Y2 true JPS5422183Y2 (en, 2012) 1979-08-03

Family

ID=28332390

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10998174U Expired JPS5422183Y2 (en, 2012) 1974-09-11 1974-09-11

Country Status (1)

Country Link
JP (1) JPS5422183Y2 (en, 2012)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60164685U (ja) * 1984-04-12 1985-11-01 三菱電機株式会社 真空装置
JPS6324129U (en, 2012) * 1986-07-31 1988-02-17

Also Published As

Publication number Publication date
JPS5136130U (en, 2012) 1976-03-17

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