Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
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Filing date
Publication date
Application filed by Nippon Telegraph and Telephone CorpfiledCriticalNippon Telegraph and Telephone Corp
Priority to JP8695977ApriorityCriticalpatent/JPS5421700A/en
Publication of JPS5421700ApublicationCriticalpatent/JPS5421700A/en
PURPOSE: To improve the removal processing by collision processing and chemical reaction, as well as to reduce the processing defect, through ionizing compound of carbon fluoride into ions of carbon fluoride and ions of fluorine and applying beams of these ions.