JPS5421610B2 - - Google Patents
Info
- Publication number
- JPS5421610B2 JPS5421610B2 JP10760575A JP10760575A JPS5421610B2 JP S5421610 B2 JPS5421610 B2 JP S5421610B2 JP 10760575 A JP10760575 A JP 10760575A JP 10760575 A JP10760575 A JP 10760575A JP S5421610 B2 JPS5421610 B2 JP S5421610B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10760575A JPS5231417A (en) | 1975-09-04 | 1975-09-04 | Movable air conditioner |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10760575A JPS5231417A (en) | 1975-09-04 | 1975-09-04 | Movable air conditioner |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5231417A JPS5231417A (en) | 1977-03-09 |
| JPS5421610B2 true JPS5421610B2 (en:Method) | 1979-08-01 |
Family
ID=14463397
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10760575A Granted JPS5231417A (en) | 1975-09-04 | 1975-09-04 | Movable air conditioner |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5231417A (en:Method) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10707099B2 (en) | 2013-08-12 | 2020-07-07 | Veeco Instruments Inc. | Collection chamber apparatus to separate multiple fluids during the semiconductor wafer processing cycle |
| US11342215B2 (en) | 2017-04-25 | 2022-05-24 | Veeco Instruments Inc. | Semiconductor wafer processing chamber |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5720656A (en) * | 1995-10-16 | 1998-02-24 | Savage; Brian T. | Aircraft air conditioning hose |
-
1975
- 1975-09-04 JP JP10760575A patent/JPS5231417A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10707099B2 (en) | 2013-08-12 | 2020-07-07 | Veeco Instruments Inc. | Collection chamber apparatus to separate multiple fluids during the semiconductor wafer processing cycle |
| US11342215B2 (en) | 2017-04-25 | 2022-05-24 | Veeco Instruments Inc. | Semiconductor wafer processing chamber |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5231417A (en) | 1977-03-09 |