JPS5421564Y2 - - Google Patents

Info

Publication number
JPS5421564Y2
JPS5421564Y2 JP6126475U JP6126475U JPS5421564Y2 JP S5421564 Y2 JPS5421564 Y2 JP S5421564Y2 JP 6126475 U JP6126475 U JP 6126475U JP 6126475 U JP6126475 U JP 6126475U JP S5421564 Y2 JPS5421564 Y2 JP S5421564Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6126475U
Other languages
Japanese (ja)
Other versions
JPS51156048U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6126475U priority Critical patent/JPS5421564Y2/ja
Publication of JPS51156048U publication Critical patent/JPS51156048U/ja
Application granted granted Critical
Publication of JPS5421564Y2 publication Critical patent/JPS5421564Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP6126475U 1975-05-12 1975-05-12 Expired JPS5421564Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6126475U JPS5421564Y2 (enExample) 1975-05-12 1975-05-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6126475U JPS5421564Y2 (enExample) 1975-05-12 1975-05-12

Publications (2)

Publication Number Publication Date
JPS51156048U JPS51156048U (enExample) 1976-12-13
JPS5421564Y2 true JPS5421564Y2 (enExample) 1979-07-31

Family

ID=28522560

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6126475U Expired JPS5421564Y2 (enExample) 1975-05-12 1975-05-12

Country Status (1)

Country Link
JP (1) JPS5421564Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS576534Y2 (enExample) * 1978-10-11 1982-02-06

Also Published As

Publication number Publication date
JPS51156048U (enExample) 1976-12-13

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