JPS5421564Y2 - - Google Patents
Info
- Publication number
- JPS5421564Y2 JPS5421564Y2 JP6126475U JP6126475U JPS5421564Y2 JP S5421564 Y2 JPS5421564 Y2 JP S5421564Y2 JP 6126475 U JP6126475 U JP 6126475U JP 6126475 U JP6126475 U JP 6126475U JP S5421564 Y2 JPS5421564 Y2 JP S5421564Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6126475U JPS5421564Y2 (en:Method) | 1975-05-12 | 1975-05-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6126475U JPS5421564Y2 (en:Method) | 1975-05-12 | 1975-05-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51156048U JPS51156048U (en:Method) | 1976-12-13 |
| JPS5421564Y2 true JPS5421564Y2 (en:Method) | 1979-07-31 |
Family
ID=28522560
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6126475U Expired JPS5421564Y2 (en:Method) | 1975-05-12 | 1975-05-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5421564Y2 (en:Method) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS576534Y2 (en:Method) * | 1978-10-11 | 1982-02-06 |
-
1975
- 1975-05-12 JP JP6126475U patent/JPS5421564Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51156048U (en:Method) | 1976-12-13 |