JPS5421564Y2 - - Google Patents

Info

Publication number
JPS5421564Y2
JPS5421564Y2 JP6126475U JP6126475U JPS5421564Y2 JP S5421564 Y2 JPS5421564 Y2 JP S5421564Y2 JP 6126475 U JP6126475 U JP 6126475U JP 6126475 U JP6126475 U JP 6126475U JP S5421564 Y2 JPS5421564 Y2 JP S5421564Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6126475U
Other languages
Japanese (ja)
Other versions
JPS51156048U (cg-RX-API-DMAC10.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6126475U priority Critical patent/JPS5421564Y2/ja
Publication of JPS51156048U publication Critical patent/JPS51156048U/ja
Application granted granted Critical
Publication of JPS5421564Y2 publication Critical patent/JPS5421564Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP6126475U 1975-05-12 1975-05-12 Expired JPS5421564Y2 (cg-RX-API-DMAC10.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6126475U JPS5421564Y2 (cg-RX-API-DMAC10.html) 1975-05-12 1975-05-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6126475U JPS5421564Y2 (cg-RX-API-DMAC10.html) 1975-05-12 1975-05-12

Publications (2)

Publication Number Publication Date
JPS51156048U JPS51156048U (cg-RX-API-DMAC10.html) 1976-12-13
JPS5421564Y2 true JPS5421564Y2 (cg-RX-API-DMAC10.html) 1979-07-31

Family

ID=28522560

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6126475U Expired JPS5421564Y2 (cg-RX-API-DMAC10.html) 1975-05-12 1975-05-12

Country Status (1)

Country Link
JP (1) JPS5421564Y2 (cg-RX-API-DMAC10.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS576534Y2 (cg-RX-API-DMAC10.html) * 1978-10-11 1982-02-06

Also Published As

Publication number Publication date
JPS51156048U (cg-RX-API-DMAC10.html) 1976-12-13

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