JPS5421561Y2 - - Google Patents

Info

Publication number
JPS5421561Y2
JPS5421561Y2 JP3342775U JP3342775U JPS5421561Y2 JP S5421561 Y2 JPS5421561 Y2 JP S5421561Y2 JP 3342775 U JP3342775 U JP 3342775U JP 3342775 U JP3342775 U JP 3342775U JP S5421561 Y2 JPS5421561 Y2 JP S5421561Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3342775U
Other versions
JPS51114454U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3342775U priority Critical patent/JPS5421561Y2/ja
Publication of JPS51114454U publication Critical patent/JPS51114454U/ja
Application granted granted Critical
Publication of JPS5421561Y2 publication Critical patent/JPS5421561Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP3342775U 1975-03-14 1975-03-14 Expired JPS5421561Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3342775U JPS5421561Y2 (ja) 1975-03-14 1975-03-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3342775U JPS5421561Y2 (ja) 1975-03-14 1975-03-14

Publications (2)

Publication Number Publication Date
JPS51114454U JPS51114454U (ja) 1976-09-17
JPS5421561Y2 true JPS5421561Y2 (ja) 1979-07-31

Family

ID=28146322

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3342775U Expired JPS5421561Y2 (ja) 1975-03-14 1975-03-14

Country Status (1)

Country Link
JP (1) JPS5421561Y2 (ja)

Also Published As

Publication number Publication date
JPS51114454U (ja) 1976-09-17

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