JPS542075A - Alignment unit - Google Patents

Alignment unit

Info

Publication number
JPS542075A
JPS542075A JP6747077A JP6747077A JPS542075A JP S542075 A JPS542075 A JP S542075A JP 6747077 A JP6747077 A JP 6747077A JP 6747077 A JP6747077 A JP 6747077A JP S542075 A JPS542075 A JP S542075A
Authority
JP
Japan
Prior art keywords
alignment unit
coincidence
judge
strength
scanning line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6747077A
Other languages
Japanese (ja)
Other versions
JPS6118858B2 (en
Inventor
Ryozo Hiraga
Yuzo Kato
Yasuo Ogino
Hideki Yoshinari
Masao Totsuka
Ichiro Kano
Akiyoshi Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP6747077A priority Critical patent/JPS542075A/en
Publication of JPS542075A publication Critical patent/JPS542075A/en
Publication of JPS6118858B2 publication Critical patent/JPS6118858B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To judge the coincidence of very fine scanning line and the scribing region by using the strength of light reflection.
COPYRIGHT: (C)1979,JPO&Japio
JP6747077A 1977-06-07 1977-06-07 Alignment unit Granted JPS542075A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6747077A JPS542075A (en) 1977-06-07 1977-06-07 Alignment unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6747077A JPS542075A (en) 1977-06-07 1977-06-07 Alignment unit

Publications (2)

Publication Number Publication Date
JPS542075A true JPS542075A (en) 1979-01-09
JPS6118858B2 JPS6118858B2 (en) 1986-05-14

Family

ID=13345870

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6747077A Granted JPS542075A (en) 1977-06-07 1977-06-07 Alignment unit

Country Status (1)

Country Link
JP (1) JPS542075A (en)

Also Published As

Publication number Publication date
JPS6118858B2 (en) 1986-05-14

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