JPS5420397B2 - - Google Patents
Info
- Publication number
- JPS5420397B2 JPS5420397B2 JP11815977A JP11815977A JPS5420397B2 JP S5420397 B2 JPS5420397 B2 JP S5420397B2 JP 11815977 A JP11815977 A JP 11815977A JP 11815977 A JP11815977 A JP 11815977A JP S5420397 B2 JPS5420397 B2 JP S5420397B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11815977A JPS5451781A (en) | 1977-09-30 | 1977-09-30 | Charged particle beam device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11815977A JPS5451781A (en) | 1977-09-30 | 1977-09-30 | Charged particle beam device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5451781A JPS5451781A (en) | 1979-04-23 |
| JPS5420397B2 true JPS5420397B2 (ja) | 1979-07-23 |
Family
ID=14729552
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11815977A Granted JPS5451781A (en) | 1977-09-30 | 1977-09-30 | Charged particle beam device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5451781A (ja) |
-
1977
- 1977-09-30 JP JP11815977A patent/JPS5451781A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5451781A (en) | 1979-04-23 |