JPS5420198B2 - - Google Patents

Info

Publication number
JPS5420198B2
JPS5420198B2 JP4030275A JP4030275A JPS5420198B2 JP S5420198 B2 JPS5420198 B2 JP S5420198B2 JP 4030275 A JP4030275 A JP 4030275A JP 4030275 A JP4030275 A JP 4030275A JP S5420198 B2 JPS5420198 B2 JP S5420198B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4030275A
Other languages
Japanese (ja)
Other versions
JPS51116126A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4030275A priority Critical patent/JPS51116126A/ja
Publication of JPS51116126A publication Critical patent/JPS51116126A/ja
Publication of JPS5420198B2 publication Critical patent/JPS5420198B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP4030275A 1975-04-04 1975-04-04 Glow discharge coating apparatus Granted JPS51116126A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4030275A JPS51116126A (en) 1975-04-04 1975-04-04 Glow discharge coating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4030275A JPS51116126A (en) 1975-04-04 1975-04-04 Glow discharge coating apparatus

Publications (2)

Publication Number Publication Date
JPS51116126A JPS51116126A (en) 1976-10-13
JPS5420198B2 true JPS5420198B2 (enrdf_load_html_response) 1979-07-20

Family

ID=12576808

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4030275A Granted JPS51116126A (en) 1975-04-04 1975-04-04 Glow discharge coating apparatus

Country Status (1)

Country Link
JP (1) JPS51116126A (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPS51116126A (en) 1976-10-13

Similar Documents

Publication Publication Date Title
AU480907A (enrdf_load_html_response)
BG21642A1 (enrdf_load_html_response)
BG21768A1 (enrdf_load_html_response)
BG21927A1 (enrdf_load_html_response)
BG22505A1 (enrdf_load_html_response)
BG23075A1 (enrdf_load_html_response)
BG23090A1 (enrdf_load_html_response)
CH1272275A4 (enrdf_load_html_response)
CH575316A5 (enrdf_load_html_response)
CH578718A5 (enrdf_load_html_response)
CH579725A5 (enrdf_load_html_response)
CH583476A5 (enrdf_load_html_response)
CH585415A5 (enrdf_load_html_response)
CH585980A5 (enrdf_load_html_response)
CH588727B5 (enrdf_load_html_response)
CH589942A5 (enrdf_load_html_response)
CH590068A5 (enrdf_load_html_response)
CH592329B5 (enrdf_load_html_response)
CH592644A5 (enrdf_load_html_response)
CH593493A5 (enrdf_load_html_response)
CH593669A5 (enrdf_load_html_response)
CH593851A5 (enrdf_load_html_response)
CH594184A5 (enrdf_load_html_response)
CH594270A5 (enrdf_load_html_response)
CH595059A5 (enrdf_load_html_response)