JPS5420111B2 - - Google Patents

Info

Publication number
JPS5420111B2
JPS5420111B2 JP1601672A JP1601672A JPS5420111B2 JP S5420111 B2 JPS5420111 B2 JP S5420111B2 JP 1601672 A JP1601672 A JP 1601672A JP 1601672 A JP1601672 A JP 1601672A JP S5420111 B2 JPS5420111 B2 JP S5420111B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1601672A
Other languages
Japanese (ja)
Other versions
JPS4886463A (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1601672A priority Critical patent/JPS5420111B2/ja
Publication of JPS4886463A publication Critical patent/JPS4886463A/ja
Publication of JPS5420111B2 publication Critical patent/JPS5420111B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Solid Thermionic Cathode (AREA)
JP1601672A 1972-02-17 1972-02-17 Expired JPS5420111B2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1601672A JPS5420111B2 (en:Method) 1972-02-17 1972-02-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1601672A JPS5420111B2 (en:Method) 1972-02-17 1972-02-17

Publications (2)

Publication Number Publication Date
JPS4886463A JPS4886463A (en:Method) 1973-11-15
JPS5420111B2 true JPS5420111B2 (en:Method) 1979-07-20

Family

ID=11904762

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1601672A Expired JPS5420111B2 (en:Method) 1972-02-17 1972-02-17

Country Status (1)

Country Link
JP (1) JPS5420111B2 (en:Method)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3011528B2 (ja) * 1992-03-24 2000-02-21 日本碍子株式会社 半導体加熱用セラミックスヒーター及びその製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3117249A (en) * 1960-02-16 1964-01-07 Sperry Rand Corp Embedded heater cathode
AT265448B (de) * 1963-04-30 1968-10-10 Matsushita Electronics Corp Verfahren zur Herstellung flacher Kathoden für Elektronenröhren
JPS433701Y1 (en:Method) * 1967-07-26 1968-02-16

Also Published As

Publication number Publication date
JPS4886463A (en:Method) 1973-11-15

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