JPS5420111B2 - - Google Patents

Info

Publication number
JPS5420111B2
JPS5420111B2 JP1601672A JP1601672A JPS5420111B2 JP S5420111 B2 JPS5420111 B2 JP S5420111B2 JP 1601672 A JP1601672 A JP 1601672A JP 1601672 A JP1601672 A JP 1601672A JP S5420111 B2 JPS5420111 B2 JP S5420111B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1601672A
Other languages
Japanese (ja)
Other versions
JPS4886463A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1601672A priority Critical patent/JPS5420111B2/ja
Publication of JPS4886463A publication Critical patent/JPS4886463A/ja
Publication of JPS5420111B2 publication Critical patent/JPS5420111B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Solid Thermionic Cathode (AREA)
JP1601672A 1972-02-17 1972-02-17 Expired JPS5420111B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1601672A JPS5420111B2 (en) 1972-02-17 1972-02-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1601672A JPS5420111B2 (en) 1972-02-17 1972-02-17

Publications (2)

Publication Number Publication Date
JPS4886463A JPS4886463A (en) 1973-11-15
JPS5420111B2 true JPS5420111B2 (en) 1979-07-20

Family

ID=11904762

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1601672A Expired JPS5420111B2 (en) 1972-02-17 1972-02-17

Country Status (1)

Country Link
JP (1) JPS5420111B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3011528B2 (en) * 1992-03-24 2000-02-21 日本碍子株式会社 Ceramic heater for heating semiconductor and method of manufacturing the same

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3117249A (en) * 1960-02-16 1964-01-07 Sperry Rand Corp Embedded heater cathode
US3341917A (en) * 1963-04-30 1967-09-19 Matsushita Electronics Corp Method of manufacturing cathodes for electron tubes
JPS433701Y1 (en) * 1967-07-26 1968-02-16

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3117249A (en) * 1960-02-16 1964-01-07 Sperry Rand Corp Embedded heater cathode
US3341917A (en) * 1963-04-30 1967-09-19 Matsushita Electronics Corp Method of manufacturing cathodes for electron tubes
JPS433701Y1 (en) * 1967-07-26 1968-02-16

Also Published As

Publication number Publication date
JPS4886463A (en) 1973-11-15

Similar Documents

Publication Publication Date Title
JPS5242571B2 (en)
JPS4921538U (en)
SU431993A1 (en)
JPS5420111B2 (en)
JPS5742738B2 (en)
JPS48107641U (en)
FR2186948A6 (en)
JPS4916153Y1 (en)
JPS4935273U (en)
JPS4982697A (en)
JPS498199U (en)
JPS4954555A (en)
JPS48106565U (en)
CH583192A5 (en)
CH579254A5 (en)
CH588553A5 (en)
CH571225A5 (en)
CH571124A5 (en)
CH586263A5 (en)
CH585698A5 (en)
CH584710A5 (en)
CH584621A5 (en)
CH571281A5 (en)
CH590252A5 (en)
CH582247A5 (en)