JPS5419528Y2 - - Google Patents

Info

Publication number
JPS5419528Y2
JPS5419528Y2 JP6109472U JP6109472U JPS5419528Y2 JP S5419528 Y2 JPS5419528 Y2 JP S5419528Y2 JP 6109472 U JP6109472 U JP 6109472U JP 6109472 U JP6109472 U JP 6109472U JP S5419528 Y2 JPS5419528 Y2 JP S5419528Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6109472U
Other languages
Japanese (ja)
Other versions
JPS4921416U (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6109472U priority Critical patent/JPS5419528Y2/ja
Publication of JPS4921416U publication Critical patent/JPS4921416U/ja
Application granted granted Critical
Publication of JPS5419528Y2 publication Critical patent/JPS5419528Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Physical Vapour Deposition (AREA)
JP6109472U 1972-05-26 1972-05-26 Expired JPS5419528Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6109472U JPS5419528Y2 (OSRAM) 1972-05-26 1972-05-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6109472U JPS5419528Y2 (OSRAM) 1972-05-26 1972-05-26

Publications (2)

Publication Number Publication Date
JPS4921416U JPS4921416U (OSRAM) 1974-02-23
JPS5419528Y2 true JPS5419528Y2 (OSRAM) 1979-07-19

Family

ID=27950249

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6109472U Expired JPS5419528Y2 (OSRAM) 1972-05-26 1972-05-26

Country Status (1)

Country Link
JP (1) JPS5419528Y2 (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5276256U (OSRAM) * 1975-12-05 1977-06-07

Also Published As

Publication number Publication date
JPS4921416U (OSRAM) 1974-02-23

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