JPS5419298B2 - - Google Patents
Info
- Publication number
- JPS5419298B2 JPS5419298B2 JP5132974A JP5132974A JPS5419298B2 JP S5419298 B2 JPS5419298 B2 JP S5419298B2 JP 5132974 A JP5132974 A JP 5132974A JP 5132974 A JP5132974 A JP 5132974A JP S5419298 B2 JPS5419298 B2 JP S5419298B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Mechanical Optical Scanning Systems (AREA)
- Facsimile Scanning Arrangements (AREA)
- Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5132974A JPS5419298B2 (https=) | 1974-05-10 | 1974-05-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5132974A JPS5419298B2 (https=) | 1974-05-10 | 1974-05-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50145008A JPS50145008A (https=) | 1975-11-21 |
| JPS5419298B2 true JPS5419298B2 (https=) | 1979-07-13 |
Family
ID=12883871
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5132974A Expired JPS5419298B2 (https=) | 1974-05-10 | 1974-05-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5419298B2 (https=) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3740900A (en) * | 1970-07-01 | 1973-06-26 | Signetics Corp | Vacuum chuck assembly for semiconductor manufacture |
-
1974
- 1974-05-10 JP JP5132974A patent/JPS5419298B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS50145008A (https=) | 1975-11-21 |