JPS5418235B2 - - Google Patents

Info

Publication number
JPS5418235B2
JPS5418235B2 JP376973A JP376973A JPS5418235B2 JP S5418235 B2 JPS5418235 B2 JP S5418235B2 JP 376973 A JP376973 A JP 376973A JP 376973 A JP376973 A JP 376973A JP S5418235 B2 JPS5418235 B2 JP S5418235B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP376973A
Other languages
Japanese (ja)
Other versions
JPS4991080A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP376973A priority Critical patent/JPS5418235B2/ja
Publication of JPS4991080A publication Critical patent/JPS4991080A/ja
Publication of JPS5418235B2 publication Critical patent/JPS5418235B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
JP376973A 1972-12-29 1972-12-29 Expired JPS5418235B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP376973A JPS5418235B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-12-29 1972-12-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP376973A JPS5418235B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-12-29 1972-12-29

Publications (2)

Publication Number Publication Date
JPS4991080A JPS4991080A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-08-30
JPS5418235B2 true JPS5418235B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-07-05

Family

ID=11566363

Family Applications (1)

Application Number Title Priority Date Filing Date
JP376973A Expired JPS5418235B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-12-29 1972-12-29

Country Status (1)

Country Link
JP (1) JPS5418235B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5614365Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1976-04-09 1981-04-03
JPS60116772A (ja) * 1983-11-29 1985-06-24 Ulvac Corp クラスタイオンビ−ム蒸発源装置
JPS60116771A (ja) * 1983-11-29 1985-06-24 Ulvac Corp クラスタイオンビ−ム蒸発源装置
US5253266A (en) * 1992-07-20 1993-10-12 Intevac, Inc. MBE effusion source with asymmetrical heaters

Also Published As

Publication number Publication date
JPS4991080A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-08-30

Similar Documents

Publication Publication Date Title
CS178440B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CS172257B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS533328B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS4947323A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CS171749B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CS171748B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
HU167381B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS4991080A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR2193823A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CS165114B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS5122571B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS4916293A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS5344665B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS5323321Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS5224591Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS5042880Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CS173099B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CS155927B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS4894803A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS4970985A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS49900U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CS175006B3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CS174340B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CS163967B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CS173083B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)