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1998-07-29 |
2005-03-29 |
Silicon Light Machines Corporation |
Method of sealing a hermetic lid to a semiconductor die at an angle
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2001-03-08 |
2007-02-13 |
Silicon Light Machines Corporation |
High contrast grating light valve type device
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2001-09-13 |
2005-08-16 |
Silicon Light Machines Corporation |
Microelectronic mechanical system and methods
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2001-11-09 |
2005-10-18 |
Silicon Light Machines Corporation |
Optical communication arrangement
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2002-05-30 |
2006-05-30 |
Silicon Light Machines Corporation |
Diffractive light modulator-based dynamic equalizer with integrated spectral monitor
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2002-06-28 |
2005-06-21 |
Silicon Light Machines Corporation |
Micro-support structures
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2002-08-20 |
2006-06-06 |
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Micro-structures with individually addressable ribbon pairs
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2002-12-17 |
2006-01-17 |
Silicon Light Machines Corporation |
Arbitrary phase profile for better equalization in dynamic gain equalizer
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2002-12-17 |
2006-06-06 |
Silicon Light Machines Corporation |
High contrast tilting ribbon blazed grating
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2002-12-18 |
2005-08-23 |
Silicon Light Machines Corporation |
Chirped optical MEM device
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2003-02-11 |
2005-09-20 |
Silicon Light Machines Corporation |
Wavelength selective switch and equalizer
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2003-02-14 |
2005-07-26 |
Silicon Light Machines Corporation |
Method and apparatus for leveling thermal stress variations in multi-layer MEMS devices
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2003-02-28 |
2006-04-11 |
Silicon Light Machines Corp |
Silicon substrate as a light modulator sacrificial layer
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2003-02-28 |
2005-07-26 |
Silicon Light Machines Corporation |
PDL mitigation structure for diffractive MEMS and gratings
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2003-03-03 |
2006-05-09 |
Silicon Light Machines Corporation |
Pre-deflected bias ribbons
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