JPS5418110B2 - - Google Patents
Info
- Publication number
- JPS5418110B2 JPS5418110B2 JP3104672A JP3104672A JPS5418110B2 JP S5418110 B2 JPS5418110 B2 JP S5418110B2 JP 3104672 A JP3104672 A JP 3104672A JP 3104672 A JP3104672 A JP 3104672A JP S5418110 B2 JPS5418110 B2 JP S5418110B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Weting (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3104672A JPS5418110B2 (https=) | 1972-03-28 | 1972-03-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3104672A JPS5418110B2 (https=) | 1972-03-28 | 1972-03-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4898781A JPS4898781A (https=) | 1973-12-14 |
| JPS5418110B2 true JPS5418110B2 (https=) | 1979-07-05 |
Family
ID=12320525
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3104672A Expired JPS5418110B2 (https=) | 1972-03-28 | 1972-03-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5418110B2 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5222229B2 (https=) * | 1972-08-18 | 1977-06-16 | ||
| JPS6070729A (ja) * | 1983-09-27 | 1985-04-22 | Shin Etsu Chem Co Ltd | 半導体装置 |
| JPS61198634A (ja) * | 1985-02-27 | 1986-09-03 | Asahi Chem Ind Co Ltd | 半導体装置の製造方法 |
| JPH0781119B2 (ja) * | 1986-10-16 | 1995-08-30 | 日立化成工業株式会社 | ポリイミド成形品の製造法 |
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1972
- 1972-03-28 JP JP3104672A patent/JPS5418110B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4898781A (https=) | 1973-12-14 |