JPS54179142U - - Google Patents
Info
- Publication number
- JPS54179142U JPS54179142U JP7903478U JP7903478U JPS54179142U JP S54179142 U JPS54179142 U JP S54179142U JP 7903478 U JP7903478 U JP 7903478U JP 7903478 U JP7903478 U JP 7903478U JP S54179142 U JPS54179142 U JP S54179142U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7903478U JPS54179142U (en) | 1978-06-08 | 1978-06-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7903478U JPS54179142U (en) | 1978-06-08 | 1978-06-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS54179142U true JPS54179142U (en) | 1979-12-18 |
Family
ID=28996626
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7903478U Pending JPS54179142U (en) | 1978-06-08 | 1978-06-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54179142U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS522176A (en) * | 1975-06-13 | 1977-01-08 | Ibm | Method of forming integrated circuit pattern |
| JPS52117578A (en) * | 1976-03-30 | 1977-10-03 | Fujitsu Ltd | Electron beam exposing method |
-
1978
- 1978-06-08 JP JP7903478U patent/JPS54179142U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS522176A (en) * | 1975-06-13 | 1977-01-08 | Ibm | Method of forming integrated circuit pattern |
| JPS52117578A (en) * | 1976-03-30 | 1977-10-03 | Fujitsu Ltd | Electron beam exposing method |