JPS5417780A - Light scattering type fine particle measuring device - Google Patents

Light scattering type fine particle measuring device

Info

Publication number
JPS5417780A
JPS5417780A JP8177077A JP8177077A JPS5417780A JP S5417780 A JPS5417780 A JP S5417780A JP 8177077 A JP8177077 A JP 8177077A JP 8177077 A JP8177077 A JP 8177077A JP S5417780 A JPS5417780 A JP S5417780A
Authority
JP
Japan
Prior art keywords
measuring device
fine particle
light scattering
scattering type
particle measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8177077A
Other languages
Japanese (ja)
Other versions
JPS5728901B2 (en
Inventor
Hideto Inoue
Toshiyuki Abe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rion Co Ltd
Original Assignee
Rion Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rion Co Ltd filed Critical Rion Co Ltd
Priority to JP8177077A priority Critical patent/JPS5417780A/en
Publication of JPS5417780A publication Critical patent/JPS5417780A/en
Publication of JPS5728901B2 publication Critical patent/JPS5728901B2/ja
Granted legal-status Critical Current

Links

JP8177077A 1977-07-08 1977-07-08 Light scattering type fine particle measuring device Granted JPS5417780A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8177077A JPS5417780A (en) 1977-07-08 1977-07-08 Light scattering type fine particle measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8177077A JPS5417780A (en) 1977-07-08 1977-07-08 Light scattering type fine particle measuring device

Publications (2)

Publication Number Publication Date
JPS5417780A true JPS5417780A (en) 1979-02-09
JPS5728901B2 JPS5728901B2 (en) 1982-06-19

Family

ID=13755692

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8177077A Granted JPS5417780A (en) 1977-07-08 1977-07-08 Light scattering type fine particle measuring device

Country Status (1)

Country Link
JP (1) JPS5417780A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5833930U (en) * 1981-08-27 1983-03-05 株式会社朝日工業社 Dust monitor for clean room or clean unit
JPS61278711A (en) * 1985-06-03 1986-12-09 Osaki Electric Co Ltd Pulse converting and integrating device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5833930U (en) * 1981-08-27 1983-03-05 株式会社朝日工業社 Dust monitor for clean room or clean unit
JPH0127081Y2 (en) * 1981-08-27 1989-08-14
JPS61278711A (en) * 1985-06-03 1986-12-09 Osaki Electric Co Ltd Pulse converting and integrating device

Also Published As

Publication number Publication date
JPS5728901B2 (en) 1982-06-19

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