JPS5417780A - Light scattering type fine particle measuring device - Google Patents
Light scattering type fine particle measuring deviceInfo
- Publication number
- JPS5417780A JPS5417780A JP8177077A JP8177077A JPS5417780A JP S5417780 A JPS5417780 A JP S5417780A JP 8177077 A JP8177077 A JP 8177077A JP 8177077 A JP8177077 A JP 8177077A JP S5417780 A JPS5417780 A JP S5417780A
- Authority
- JP
- Japan
- Prior art keywords
- measuring device
- fine particle
- light scattering
- scattering type
- particle measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000149 argon plasma sintering Methods 0.000 title 1
- 239000010419 fine particle Substances 0.000 title 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8177077A JPS5417780A (en) | 1977-07-08 | 1977-07-08 | Light scattering type fine particle measuring device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8177077A JPS5417780A (en) | 1977-07-08 | 1977-07-08 | Light scattering type fine particle measuring device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5417780A true JPS5417780A (en) | 1979-02-09 |
JPS5728901B2 JPS5728901B2 (en) | 1982-06-19 |
Family
ID=13755692
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8177077A Granted JPS5417780A (en) | 1977-07-08 | 1977-07-08 | Light scattering type fine particle measuring device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5417780A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5833930U (en) * | 1981-08-27 | 1983-03-05 | 株式会社朝日工業社 | Dust monitor for clean room or clean unit |
JPS61278711A (en) * | 1985-06-03 | 1986-12-09 | Osaki Electric Co Ltd | Pulse converting and integrating device |
-
1977
- 1977-07-08 JP JP8177077A patent/JPS5417780A/en active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5833930U (en) * | 1981-08-27 | 1983-03-05 | 株式会社朝日工業社 | Dust monitor for clean room or clean unit |
JPH0127081Y2 (en) * | 1981-08-27 | 1989-08-14 | ||
JPS61278711A (en) * | 1985-06-03 | 1986-12-09 | Osaki Electric Co Ltd | Pulse converting and integrating device |
Also Published As
Publication number | Publication date |
---|---|
JPS5728901B2 (en) | 1982-06-19 |
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