JPS5417573B2 - - Google Patents
Info
- Publication number
- JPS5417573B2 JPS5417573B2 JP1441675A JP1441675A JPS5417573B2 JP S5417573 B2 JPS5417573 B2 JP S5417573B2 JP 1441675 A JP1441675 A JP 1441675A JP 1441675 A JP1441675 A JP 1441675A JP S5417573 B2 JPS5417573 B2 JP S5417573B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/02—Local etching
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Weting (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1441675A JPS5189846A (ja) | 1975-02-05 | 1975-02-05 | Aruminiumupataannokeiseiho |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1441675A JPS5189846A (ja) | 1975-02-05 | 1975-02-05 | Aruminiumupataannokeiseiho |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5189846A JPS5189846A (ja) | 1976-08-06 |
| JPS5417573B2 true JPS5417573B2 (US20030204162A1-20031030-M00001.png) | 1979-06-30 |
Family
ID=11860410
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1441675A Granted JPS5189846A (ja) | 1975-02-05 | 1975-02-05 | Aruminiumupataannokeiseiho |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5189846A (US20030204162A1-20031030-M00001.png) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6335555B2 (US20030204162A1-20031030-M00001.png) * | 1982-04-16 | 1988-07-15 | Kobe Steel Ltd | |
| JPH0127954B2 (US20030204162A1-20031030-M00001.png) * | 1982-04-16 | 1989-05-31 | Kobe Steel Ltd | |
| JPH0127953B2 (US20030204162A1-20031030-M00001.png) * | 1982-04-16 | 1989-05-31 | Kobe Steel Ltd |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007010864A1 (ja) * | 2005-07-15 | 2007-01-25 | Ulvac Coating Corporation | グレートーンマスク用ブランクス、及びそれを用いたグレートーンマスク及びその製造方法 |
| KR101953215B1 (ko) * | 2012-10-05 | 2019-03-04 | 삼성디스플레이 주식회사 | 식각 조성물, 금속 배선 및 표시 기판의 제조방법 |
| JP6295739B2 (ja) * | 2014-03-11 | 2018-03-20 | 東洋インキＳｃホールディングス株式会社 | フィルム状感光性樹脂組成物、感光性ドライフィルム、および感光性ドライフィルムの製造方法、並びに液状感光性樹脂組成物 |
-
1975
- 1975-02-05 JP JP1441675A patent/JPS5189846A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6335555B2 (US20030204162A1-20031030-M00001.png) * | 1982-04-16 | 1988-07-15 | Kobe Steel Ltd | |
| JPH0127954B2 (US20030204162A1-20031030-M00001.png) * | 1982-04-16 | 1989-05-31 | Kobe Steel Ltd | |
| JPH0127953B2 (US20030204162A1-20031030-M00001.png) * | 1982-04-16 | 1989-05-31 | Kobe Steel Ltd |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5189846A (ja) | 1976-08-06 |
