JPS54173667U - - Google Patents
Info
- Publication number
- JPS54173667U JPS54173667U JP7122778U JP7122778U JPS54173667U JP S54173667 U JPS54173667 U JP S54173667U JP 7122778 U JP7122778 U JP 7122778U JP 7122778 U JP7122778 U JP 7122778U JP S54173667 U JPS54173667 U JP S54173667U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7122778U JPS54173667U (en) | 1978-05-26 | 1978-05-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7122778U JPS54173667U (en) | 1978-05-26 | 1978-05-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS54173667U true JPS54173667U (en) | 1979-12-07 |
Family
ID=28981778
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7122778U Pending JPS54173667U (en) | 1978-05-26 | 1978-05-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54173667U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04360524A (en) * | 1991-06-07 | 1992-12-14 | Murata Mfg Co Ltd | Heat treatment furnace for compound semiconductor substrate |
-
1978
- 1978-05-26 JP JP7122778U patent/JPS54173667U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04360524A (en) * | 1991-06-07 | 1992-12-14 | Murata Mfg Co Ltd | Heat treatment furnace for compound semiconductor substrate |