JPS54167678U - - Google Patents
Info
- Publication number
- JPS54167678U JPS54167678U JP6628478U JP6628478U JPS54167678U JP S54167678 U JPS54167678 U JP S54167678U JP 6628478 U JP6628478 U JP 6628478U JP 6628478 U JP6628478 U JP 6628478U JP S54167678 U JPS54167678 U JP S54167678U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6628478U JPS54167678U (ja) | 1978-05-16 | 1978-05-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6628478U JPS54167678U (ja) | 1978-05-16 | 1978-05-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54167678U true JPS54167678U (ja) | 1979-11-26 |
Family
ID=28972136
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6628478U Pending JPS54167678U (ja) | 1978-05-16 | 1978-05-16 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54167678U (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5769737A (en) * | 1980-10-17 | 1982-04-28 | Hitachi Ltd | Coating method and device for resist on both side surfaces of wafer |
JPS614772U (ja) * | 1984-06-12 | 1986-01-13 | ホ−ヤ株式会社 | スプレ−装置 |
JPH0283927A (ja) * | 1988-09-21 | 1990-03-26 | Shibaura Eng Works Co Ltd | ガラス基板の乾燥装置 |
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1978
- 1978-05-16 JP JP6628478U patent/JPS54167678U/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5769737A (en) * | 1980-10-17 | 1982-04-28 | Hitachi Ltd | Coating method and device for resist on both side surfaces of wafer |
JPS614772U (ja) * | 1984-06-12 | 1986-01-13 | ホ−ヤ株式会社 | スプレ−装置 |
JPH0283927A (ja) * | 1988-09-21 | 1990-03-26 | Shibaura Eng Works Co Ltd | ガラス基板の乾燥装置 |