JPS5416391B2 - - Google Patents
Info
- Publication number
- JPS5416391B2 JPS5416391B2 JP5887977A JP5887977A JPS5416391B2 JP S5416391 B2 JPS5416391 B2 JP S5416391B2 JP 5887977 A JP5887977 A JP 5887977A JP 5887977 A JP5887977 A JP 5887977A JP S5416391 B2 JPS5416391 B2 JP S5416391B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5887977A JPS53144677A (en) | 1977-05-23 | 1977-05-23 | Electron beam mask and production of the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5887977A JPS53144677A (en) | 1977-05-23 | 1977-05-23 | Electron beam mask and production of the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS53144677A JPS53144677A (en) | 1978-12-16 |
| JPS5416391B2 true JPS5416391B2 (en) | 1979-06-21 |
Family
ID=13097034
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5887977A Granted JPS53144677A (en) | 1977-05-23 | 1977-05-23 | Electron beam mask and production of the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS53144677A (en) |
-
1977
- 1977-05-23 JP JP5887977A patent/JPS53144677A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS53144677A (en) | 1978-12-16 |