JPS54163684A - Preparation of semiconductor device - Google Patents
Preparation of semiconductor deviceInfo
- Publication number
- JPS54163684A JPS54163684A JP7300178A JP7300178A JPS54163684A JP S54163684 A JPS54163684 A JP S54163684A JP 7300178 A JP7300178 A JP 7300178A JP 7300178 A JP7300178 A JP 7300178A JP S54163684 A JPS54163684 A JP S54163684A
- Authority
- JP
- Japan
- Prior art keywords
- preparation
- semiconductor device
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7300178A JPS54163684A (en) | 1978-06-15 | 1978-06-15 | Preparation of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7300178A JPS54163684A (en) | 1978-06-15 | 1978-06-15 | Preparation of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54163684A true JPS54163684A (en) | 1979-12-26 |
Family
ID=13505673
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7300178A Pending JPS54163684A (en) | 1978-06-15 | 1978-06-15 | Preparation of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54163684A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60110224U (en) * | 1983-12-28 | 1985-07-26 | 三菱樹脂株式会社 | container with lid |
JPS62114222A (en) * | 1985-11-14 | 1987-05-26 | Hitachi Ltd | Exposing apparatus |
JPS6428915A (en) * | 1987-07-24 | 1989-01-31 | Oki Electric Ind Co Ltd | Wafer alignment device and alignment mark used therefor |
-
1978
- 1978-06-15 JP JP7300178A patent/JPS54163684A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60110224U (en) * | 1983-12-28 | 1985-07-26 | 三菱樹脂株式会社 | container with lid |
JPS62114222A (en) * | 1985-11-14 | 1987-05-26 | Hitachi Ltd | Exposing apparatus |
JPS6428915A (en) * | 1987-07-24 | 1989-01-31 | Oki Electric Ind Co Ltd | Wafer alignment device and alignment mark used therefor |
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