JPS54163684A - Preparation of semiconductor device - Google Patents

Preparation of semiconductor device

Info

Publication number
JPS54163684A
JPS54163684A JP7300178A JP7300178A JPS54163684A JP S54163684 A JPS54163684 A JP S54163684A JP 7300178 A JP7300178 A JP 7300178A JP 7300178 A JP7300178 A JP 7300178A JP S54163684 A JPS54163684 A JP S54163684A
Authority
JP
Japan
Prior art keywords
preparation
semiconductor device
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7300178A
Other languages
Japanese (ja)
Inventor
Youichi Kuriyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP7300178A priority Critical patent/JPS54163684A/en
Publication of JPS54163684A publication Critical patent/JPS54163684A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP7300178A 1978-06-15 1978-06-15 Preparation of semiconductor device Pending JPS54163684A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7300178A JPS54163684A (en) 1978-06-15 1978-06-15 Preparation of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7300178A JPS54163684A (en) 1978-06-15 1978-06-15 Preparation of semiconductor device

Publications (1)

Publication Number Publication Date
JPS54163684A true JPS54163684A (en) 1979-12-26

Family

ID=13505673

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7300178A Pending JPS54163684A (en) 1978-06-15 1978-06-15 Preparation of semiconductor device

Country Status (1)

Country Link
JP (1) JPS54163684A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60110224U (en) * 1983-12-28 1985-07-26 三菱樹脂株式会社 container with lid
JPS62114222A (en) * 1985-11-14 1987-05-26 Hitachi Ltd Exposing apparatus
JPS6428915A (en) * 1987-07-24 1989-01-31 Oki Electric Ind Co Ltd Wafer alignment device and alignment mark used therefor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60110224U (en) * 1983-12-28 1985-07-26 三菱樹脂株式会社 container with lid
JPS62114222A (en) * 1985-11-14 1987-05-26 Hitachi Ltd Exposing apparatus
JPS6428915A (en) * 1987-07-24 1989-01-31 Oki Electric Ind Co Ltd Wafer alignment device and alignment mark used therefor

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