JPS54162969U - - Google Patents

Info

Publication number
JPS54162969U
JPS54162969U JP6037378U JP6037378U JPS54162969U JP S54162969 U JPS54162969 U JP S54162969U JP 6037378 U JP6037378 U JP 6037378U JP 6037378 U JP6037378 U JP 6037378U JP S54162969 U JPS54162969 U JP S54162969U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6037378U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6037378U priority Critical patent/JPS54162969U/ja
Publication of JPS54162969U publication Critical patent/JPS54162969U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
JP6037378U 1978-05-04 1978-05-04 Pending JPS54162969U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6037378U JPS54162969U (zh) 1978-05-04 1978-05-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6037378U JPS54162969U (zh) 1978-05-04 1978-05-04

Publications (1)

Publication Number Publication Date
JPS54162969U true JPS54162969U (zh) 1979-11-14

Family

ID=28960837

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6037378U Pending JPS54162969U (zh) 1978-05-04 1978-05-04

Country Status (1)

Country Link
JP (1) JPS54162969U (zh)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8980045B2 (en) 2007-05-30 2015-03-17 Applied Materials, Inc. Substrate cleaning chamber and components
US9127362B2 (en) 2005-10-31 2015-09-08 Applied Materials, Inc. Process kit and target for substrate processing chamber
US9481608B2 (en) 2005-07-13 2016-11-01 Applied Materials, Inc. Surface annealing of components for substrate processing chambers

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9481608B2 (en) 2005-07-13 2016-11-01 Applied Materials, Inc. Surface annealing of components for substrate processing chambers
US9127362B2 (en) 2005-10-31 2015-09-08 Applied Materials, Inc. Process kit and target for substrate processing chamber
US8980045B2 (en) 2007-05-30 2015-03-17 Applied Materials, Inc. Substrate cleaning chamber and components

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