JPS54162643A - Chargeddparticle beam working and apparatus therefor - Google Patents

Chargeddparticle beam working and apparatus therefor

Info

Publication number
JPS54162643A
JPS54162643A JP7199678A JP7199678A JPS54162643A JP S54162643 A JPS54162643 A JP S54162643A JP 7199678 A JP7199678 A JP 7199678A JP 7199678 A JP7199678 A JP 7199678A JP S54162643 A JPS54162643 A JP S54162643A
Authority
JP
Japan
Prior art keywords
chargeddparticle
apparatus therefor
beam working
working
therefor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7199678A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6316233B2 (en, 2012
Inventor
Asaki Takemoto
Etsuzou Murakami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daihen Corp
Original Assignee
Osaka Transformer Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osaka Transformer Co Ltd filed Critical Osaka Transformer Co Ltd
Priority to JP7199678A priority Critical patent/JPS54162643A/ja
Publication of JPS54162643A publication Critical patent/JPS54162643A/ja
Publication of JPS6316233B2 publication Critical patent/JPS6316233B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Welding Or Cutting Using Electron Beams (AREA)
JP7199678A 1978-06-13 1978-06-13 Chargeddparticle beam working and apparatus therefor Granted JPS54162643A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7199678A JPS54162643A (en) 1978-06-13 1978-06-13 Chargeddparticle beam working and apparatus therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7199678A JPS54162643A (en) 1978-06-13 1978-06-13 Chargeddparticle beam working and apparatus therefor

Publications (2)

Publication Number Publication Date
JPS54162643A true JPS54162643A (en) 1979-12-24
JPS6316233B2 JPS6316233B2 (en, 2012) 1988-04-07

Family

ID=13476587

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7199678A Granted JPS54162643A (en) 1978-06-13 1978-06-13 Chargeddparticle beam working and apparatus therefor

Country Status (1)

Country Link
JP (1) JPS54162643A (en, 2012)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01176519U (en, 2012) * 1988-06-03 1989-12-15
JPH0238318U (en, 2012) * 1988-09-06 1990-03-14

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4914346A (en, 2012) * 1972-06-01 1974-02-07
JPS49107943A (en, 2012) * 1973-02-20 1974-10-14
JPS5314140A (en) * 1976-07-23 1978-02-08 Shin Meiwa Ind Co Ltd Method of correcting error of position controller
JPS5343652A (en) * 1976-10-04 1978-04-19 Tokyo Shibaura Electric Co Automatic welding machine

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4914346A (en, 2012) * 1972-06-01 1974-02-07
JPS49107943A (en, 2012) * 1973-02-20 1974-10-14
JPS5314140A (en) * 1976-07-23 1978-02-08 Shin Meiwa Ind Co Ltd Method of correcting error of position controller
JPS5343652A (en) * 1976-10-04 1978-04-19 Tokyo Shibaura Electric Co Automatic welding machine

Also Published As

Publication number Publication date
JPS6316233B2 (en, 2012) 1988-04-07

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