JPS5416242B2 - - Google Patents
Info
- Publication number
- JPS5416242B2 JPS5416242B2 JP13653273A JP13653273A JPS5416242B2 JP S5416242 B2 JPS5416242 B2 JP S5416242B2 JP 13653273 A JP13653273 A JP 13653273A JP 13653273 A JP13653273 A JP 13653273A JP S5416242 B2 JPS5416242 B2 JP S5416242B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13653273A JPS5416242B2 (ja�@�@) | 1973-11-24 | 1973-11-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13653273A JPS5416242B2 (ja�@�@) | 1973-11-24 | 1973-11-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5084310A JPS5084310A (ja�@�@) | 1975-07-08 |
| JPS5416242B2 true JPS5416242B2 (ja�@�@) | 1979-06-21 |
Family
ID=15177376
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13653273A Expired JPS5416242B2 (ja�@�@) | 1973-11-24 | 1973-11-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5416242B2 (ja�@�@) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5443403U (ja�@�@) * | 1977-08-31 | 1979-03-24 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5129443B2 (ja�@�@) * | 1972-07-20 | 1976-08-25 |
-
1973
- 1973-11-24 JP JP13653273A patent/JPS5416242B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5084310A (ja�@�@) | 1975-07-08 |