JPS54161319A - High energy beam setting resist material and method of using same - Google Patents
High energy beam setting resist material and method of using sameInfo
- Publication number
- JPS54161319A JPS54161319A JP6980878A JP6980878A JPS54161319A JP S54161319 A JPS54161319 A JP S54161319A JP 6980878 A JP6980878 A JP 6980878A JP 6980878 A JP6980878 A JP 6980878A JP S54161319 A JPS54161319 A JP S54161319A
- Authority
- JP
- Japan
- Prior art keywords
- same
- high energy
- energy beam
- resist material
- beam setting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6980878A JPS54161319A (en) | 1978-06-12 | 1978-06-12 | High energy beam setting resist material and method of using same |
AU38704/78A AU3870478A (en) | 1977-08-09 | 1978-08-07 | High energy radiation cruable resist material |
NL787808279A NL7808279A (en) | 1977-08-09 | 1978-08-08 | RESIST MATERIAL AND METHOD OF USE THEREOF. |
GB7832662A GB2004283B (en) | 1977-08-09 | 1978-08-08 | High energy radiation curable resist material and method of using the same |
FR7823372A FR2400042A1 (en) | 1977-08-09 | 1978-08-08 | PROTECTIVE MATERIAL CURABLE UNDER THE EFFECT OF HIGH ENERGY RADIATION AND ITS PROCESS FOR USE |
IT50684/78A IT1106873B (en) | 1977-08-09 | 1978-08-09 | HARDENABLE RESERVE MATERIAL BY IRRADIATION AND PROCEDURE TO PRODUCE IT |
US05/932,160 US4299911A (en) | 1977-08-09 | 1978-08-09 | High energy radiation curable resist material and method of using the same |
DE19782834791 DE2834791A1 (en) | 1977-08-09 | 1978-08-09 | RESISTANT MATERIAL HARDENED BY HIGH-ENERGETIC RADIATION AND MANUFACTURING PROCESS |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6980878A JPS54161319A (en) | 1978-06-12 | 1978-06-12 | High energy beam setting resist material and method of using same |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54161319A true JPS54161319A (en) | 1979-12-20 |
JPS6339888B2 JPS6339888B2 (en) | 1988-08-08 |
Family
ID=13413414
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6980878A Granted JPS54161319A (en) | 1977-08-09 | 1978-06-12 | High energy beam setting resist material and method of using same |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54161319A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0646580A3 (en) * | 1993-09-16 | 1995-10-11 | Ciba Geigy Ag | Vinylether compounds with additional functional groups differing from vinylether and their use in the formulation of curable compositions. |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5429397A (en) * | 1977-08-09 | 1979-03-05 | Somar Mfg | Preparation of novel resist materrial |
-
1978
- 1978-06-12 JP JP6980878A patent/JPS54161319A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5429397A (en) * | 1977-08-09 | 1979-03-05 | Somar Mfg | Preparation of novel resist materrial |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0646580A3 (en) * | 1993-09-16 | 1995-10-11 | Ciba Geigy Ag | Vinylether compounds with additional functional groups differing from vinylether and their use in the formulation of curable compositions. |
Also Published As
Publication number | Publication date |
---|---|
JPS6339888B2 (en) | 1988-08-08 |
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