JPS54161319A - High energy beam setting resist material and method of using same - Google Patents

High energy beam setting resist material and method of using same

Info

Publication number
JPS54161319A
JPS54161319A JP6980878A JP6980878A JPS54161319A JP S54161319 A JPS54161319 A JP S54161319A JP 6980878 A JP6980878 A JP 6980878A JP 6980878 A JP6980878 A JP 6980878A JP S54161319 A JPS54161319 A JP S54161319A
Authority
JP
Japan
Prior art keywords
same
high energy
energy beam
resist material
beam setting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6980878A
Other languages
Japanese (ja)
Other versions
JPS6339888B2 (en
Inventor
Koutarou Nagasawa
Hideo Ochi
Yoshii Shibata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Somar Corp
Original Assignee
Somar Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Somar Manufacturing Co Ltd filed Critical Somar Manufacturing Co Ltd
Priority to JP6980878A priority Critical patent/JPS54161319A/en
Priority to AU38704/78A priority patent/AU3870478A/en
Priority to NL787808279A priority patent/NL7808279A/en
Priority to GB7832662A priority patent/GB2004283B/en
Priority to FR7823372A priority patent/FR2400042A1/en
Priority to IT50684/78A priority patent/IT1106873B/en
Priority to US05/932,160 priority patent/US4299911A/en
Priority to DE19782834791 priority patent/DE2834791A1/en
Publication of JPS54161319A publication Critical patent/JPS54161319A/en
Publication of JPS6339888B2 publication Critical patent/JPS6339888B2/ja
Granted legal-status Critical Current

Links

JP6980878A 1977-08-09 1978-06-12 High energy beam setting resist material and method of using same Granted JPS54161319A (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP6980878A JPS54161319A (en) 1978-06-12 1978-06-12 High energy beam setting resist material and method of using same
AU38704/78A AU3870478A (en) 1977-08-09 1978-08-07 High energy radiation cruable resist material
NL787808279A NL7808279A (en) 1977-08-09 1978-08-08 RESIST MATERIAL AND METHOD OF USE THEREOF.
GB7832662A GB2004283B (en) 1977-08-09 1978-08-08 High energy radiation curable resist material and method of using the same
FR7823372A FR2400042A1 (en) 1977-08-09 1978-08-08 PROTECTIVE MATERIAL CURABLE UNDER THE EFFECT OF HIGH ENERGY RADIATION AND ITS PROCESS FOR USE
IT50684/78A IT1106873B (en) 1977-08-09 1978-08-09 HARDENABLE RESERVE MATERIAL BY IRRADIATION AND PROCEDURE TO PRODUCE IT
US05/932,160 US4299911A (en) 1977-08-09 1978-08-09 High energy radiation curable resist material and method of using the same
DE19782834791 DE2834791A1 (en) 1977-08-09 1978-08-09 RESISTANT MATERIAL HARDENED BY HIGH-ENERGETIC RADIATION AND MANUFACTURING PROCESS

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6980878A JPS54161319A (en) 1978-06-12 1978-06-12 High energy beam setting resist material and method of using same

Publications (2)

Publication Number Publication Date
JPS54161319A true JPS54161319A (en) 1979-12-20
JPS6339888B2 JPS6339888B2 (en) 1988-08-08

Family

ID=13413414

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6980878A Granted JPS54161319A (en) 1977-08-09 1978-06-12 High energy beam setting resist material and method of using same

Country Status (1)

Country Link
JP (1) JPS54161319A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0646580A3 (en) * 1993-09-16 1995-10-11 Ciba Geigy Ag Vinylether compounds with additional functional groups differing from vinylether and their use in the formulation of curable compositions.

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5429397A (en) * 1977-08-09 1979-03-05 Somar Mfg Preparation of novel resist materrial

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5429397A (en) * 1977-08-09 1979-03-05 Somar Mfg Preparation of novel resist materrial

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0646580A3 (en) * 1993-09-16 1995-10-11 Ciba Geigy Ag Vinylether compounds with additional functional groups differing from vinylether and their use in the formulation of curable compositions.

Also Published As

Publication number Publication date
JPS6339888B2 (en) 1988-08-08

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